Nitrogen trifluoride
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Nitrogen trifluoride (NF
3) is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics.[6] Nitrogen trifluoride is also an extremely strong and long-lived greenhouse gas. Its atmospheric burden exceeded 2 parts per trillion during 2019 and has doubled every five years since the late 20th century.[7][8]
Quick Facts Names, Identifiers ...
Names | |
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IUPAC name
Nitrogen trifluoride | |
Other names
Nitrogen fluoride Trifluoramine Trifluorammonia | |
Identifiers | |
3D model (JSmol) |
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ChEBI | |
ChemSpider |
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ECHA InfoCard | 100.029.097 |
EC Number |
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1551 | |
PubChem CID |
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RTECS number |
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UNII | |
UN number | 2451 |
CompTox Dashboard (EPA) |
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Properties | |
NF3 | |
Molar mass | 71.00 g/mol |
Appearance | colorless gas |
Odor | moldy |
Density | 3.003 kg/m3 (1 atm, 15 °C) 1.885 g/cm3 (liquid at b.p.) |
Melting point | −207.15 °C (−340.87 °F; 66.00 K) |
Boiling point | −129.06 °C (−200.31 °F; 144.09 K) |
0.021 g/100 mL | |
Vapor pressure | 44.0 atm[1](−38.5 °F or −39.2 °C or 234.0 K)[lower-alpha 1] |
Refractive index (nD) |
1.0004 |
Structure | |
trigonal pyramidal | |
0.234 D | |
Thermochemistry | |
Heat capacity (C) |
53.26 J/(mol·K) |
Std molar entropy (S⦵298) |
260.3 J/(mol·K) |
Std enthalpy of formation (ΔfH⦵298) |
−31.4 kcal/mol[2] −109 kJ/mol[3] |
Gibbs free energy (ΔfG⦵) |
−84.4 kJ/mol |
Hazards | |
GHS labelling: | |
H270, H280, H332 | |
P220, P244, P260, P304+P340, P315, P370+P376, P403 | |
NFPA 704 (fire diamond) | |
Flash point | Non-flammable |
Lethal dose or concentration (LD, LC): | |
LC50 (median concentration) |
2000 ppm (mouse, 4 h) 9600 ppm (dog, 1 h) 7500 ppm (monkey, 1 h) 6700 ppm (rat, 1 h) 7500 ppm (mouse, 1 h)[4] |
NIOSH (US health exposure limits): | |
PEL (Permissible) |
TWA 10 ppm (29 mg/m3)[5] |
REL (Recommended) |
TWA 10 ppm (29 mg/m3)[5] |
IDLH (Immediate danger) |
1000 ppm[5] |
Safety data sheet (SDS) | AirLiquide |
Related compounds | |
Other anions |
nitrogen trichloride nitrogen tribromide nitrogen triiodide ammonia |
Other cations |
phosphorus trifluoride arsenic trifluoride antimony trifluoride bismuth trifluoride |
Related binary fluoro-azanes |
tetrafluorohydrazine |
Related compounds |
dinitrogen difluoride |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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